Ctrl-P to Print
Micro Electro Mechanical Systems Exchange (MX)
Program Manager: Dr. Tayo Akinwande
Overview
Provide flexible access to complex Micro Electro Mechanical Systems (MEMS) fabrication technology in a wide variety of materials and to a broad multi-disciplinary user base via the MEMS Exchange service. In addition, insure self-sustained operation of MEMS Exchange after the end of the program by adding several process modules to the existing repertoire and increasing the number of processes run per year by >3X so as to raise revenues to the point of self-sufficiency. Among the future payoffs of this program is the establishment of an accessible infrastructure for low or medium volume production of MEMS-enabled products for Department of Defense (DoD) applications.
Vision Statement
Micro Electro Mechanical Systems (MEMS) technology, with its ability to reduce both size and power consumption in a myriad of sensor, communication, and information processing devices, has been identified as a key enabling technology for military platforms in all areas. Among the many examples of high payoff applications of MEMS technologies are micromechanical logic circuits for munitions safe-and-arming devices, micromechanical vibrating resonators for frequency selection in miniaturized communication transceivers, programmable micromechanical gratings for remote toxic gas sensors, movable micromirrors for optical switching, micro fuel cells for portable, long-lasting power generation, and chip-scale atomic clocks for portable GPS and ultra-secure communications. The most recent advancements in MEMS technology have invariably required participation from researchers from a widely diverse set of backgrounds, many of whom do not have access to the full spectrum of MEMS technologies. In allowing and encouraging the use of a wide variety of materials and fabrication processes by a broad multi-disciplinary user base, the development of MEMS Exchange should prove instrumental in providing the accessibility to MEMS technology required for a myriad of present and future MEMS-enabled devices for military platforms. In addition, MEMS Exchange can serve as a much-needed fabrication infrastructure for low or medium volume production of MEMS-enabled products for DoD applications.