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Dr. Thomas KennyProgram Manager

Thomas Kenny is a Program Manager in the Microsystems Technology Office of the Defense Advanced Research Projects Agency (DARPA), Arlington, VA; he is serving in this capacity while on leave from his faculty position as a Professor in the Design Division of the Mechanical Engineering Department at Stanford University. He received his B.S. (1983) degree in Physics from the University of Minnesota, and his M.S. (1987) and Ph.D. (1989) degrees, also in Physics, from the University of California, Berkeley. From 1989-1994, Dr. Kenny was a research physicist in the MicroDevices Lab at the NASA Jet Propulsion Laboratory, where he worked on MEMS-based sensors for future NASA and DOD missions. Since joining the Stanford faculty in 1994, he has led a research program on MEMS sensors, devices for detecting ultra-small forces, and device and instrument packaging. He has also worked in collaboration with Stanford colleagues Professors Kenneth Goodson and Juan Santiago on closed-loop cooling for microprocessors, which was funded by the DARPA HERETIC program. This research led to the formation of Cooligy, a venture-backed startup that has raised $45M and employs 40 people. Dr. Kenny's recent research, supported by the DARPA HERMIT program, has focused on encapsulation of inertial sensors and resonators. This work has led to the formation of SiTime, another venture-backed startup that recently raised $25M and opened its doors in January 2005. He is the author or co-author of more than 35 patents and more than 70 journal publications.