The Microelectromechanical Systems (MEMS) focus area applies the advantages of miniaturization, multiple components and integrated microelectronics to the design and construction of integrated electromechanical and electro chemical mechanical systems. Specifically, programs within this thrust area aim to address issues ranging from the scaling of devices and physical forces to new organization and control strategies for distributed, high-density arrays of sensor and actuator elements. The MEMS thrust has three principal objectives: the realization of advanced devices and systems concepts, the development and insertion of MEMS into DoD systems, and the creation of support and access technologies to catalyze a MEMS technology infrastructure.